Abstract: An optical device provided with an optical parts position adjusting and fixing device for adjusting and fixing the position of the optical parts moving in an optical axis direction, wherein the position adjusting and fixing device is provided with a long slotted hole extended in the optical axis direction formed on a side surface of the optical parts; a fixing means which is mounted on an object to be fixed of the optical parts and which is movable along the long slotted hole; a non-penetrating screw hole formed in the fixing means and which is divided by a slit; and a screw which is screwed into the screw hole and spreads the slit when screwed into the screw hole so as to press the outer surface of the fixing means against the inner surface of the long slotted hole.

Abstract: A measuring probe includes a stylus having one or more contact portions; a detection element configured to detect a movement of the stylus based on a contact made by the contact portions; a signal processing portion configured to process a signal from the detection element to output a measurement signal; and a stylus motion mechanism. The stylus motion mechanism includes a first motion portion configured to enable motion of the stylus from a rest position in a positive axial direction when a corresponding force in the positive axial direction is applied by a contact of a contact portion of the stylus with a workpiece; and a second motion portion configured to enable motion of the stylus from the rest position in a negative axial direction opposite to the positive axial direction when a corresponding force is applied by a contact of a contact portion of the stylus with a workpiece.

Abstract: The measurement machine includes: a holding section where a measurement target is held; a measurement unit (a first measurement unit and a second measurement unit) disposed at a position facing the holding section and provided with sensors that is configured to perform a measurement process on the measurement target; a frame whose position with respect to the holding section is fixed; and a plurality of arms coupling the frame with the measurement unit.

Abstract: A working machine (base supporting device) includes a base having an upper surface that defines a horizontal plane including X and Y directions; first supports provided for opposite end portions in the X direction of the base and supporting the base in a Z direction; a second support disposed between the opposite end portions of the base supported by the first supports, supporting the base in the Z direction, and being adjustable in a position in the Z direction at which the base is supported; a deflection detecting section that detects an amount of deflection in the Z direction of the base; and a deflection controlling section that controls the second support, in which the deflection controlling section controls, based on the amount of deflection detected by the deflection detecting section, the second support to make the upper surface parallel to the X direction.

Abstract: A calibration data acquisition method includes: a first holding step of holding an inspection gauge provided with a plurality of portions to be examined in a first posture with a gauge moving apparatus; a first measuring step of acquiring first distance data by measuring a distance between the plurality of portions to be examined with the three-dimensional measuring apparatus; a second holding step of holding the inspection gauge in a second posture with the gauge moving apparatus, after the first measuring step; a second measuring step of acquiring second distance data by measuring a distance between the plurality of portions to be examined of the inspection gauge in the second posture with the three-dimensional measuring apparatus; and a step of generating calibration data including the first distance data and the second distance data.

Abstract: ID numbers of connected multiple modules are easily automatically set. Each of the multiple modules includes an ID number information holding unit that holds its own ID number information, a first command generation unit that generates a first command for notifying its rear stage of its own ID number information, a first command output unit that outputs the first command from a rear-stage output port, a second command generation unit that generates a second command for notifying its front stage of its own ID number information and ID number information on its rear-stage modules, a second command output unit that outputs the second command from a front-stage output port, and an ID number information update unit that sets, when the first command is received from a front-stage module, new ID number obtained by adding “1” to the ID number of the front-stage module contained in the received first command as its own ID number information in the ID number information holding unit.

Abstract: To provide a fixing device improved in fixation of an annular member to a cylindrical member. The fixing device for fixing the annular member to the cylindrical member that includes a first fixing portion and a second fixing portion. The first fixing portion includes an annular portion and an adjustment portion. The annular portion covers an outer peripheral surface of the cylindrical member from outward in a radial direction. A circumferential length of the annular portion is adjustable with the adjustment portion. The second fixing portion is fixed to the first fixing portion and fixed to the annular member.

Abstract: An image detection device includes: a variable focal length lens whose focal length is periodically changed in response to a drive signal that is periodic; an illuminator configured to illuminate a measurement target; an image detector configured to detect an image of the measurement target through the variable focal length lens; a drive controller configured to output the drive signal to the variable focal length lens; a light-emission controller configured to output a light-emission signal, which is in synchronization with the drive signal, to the illuminator; an oscillation sensor configured to detect oscillation information of the variable focal length lens; and a synchronous controller configured to adjust an output timing of the light-emission signal based on the oscillation information.

Abstract: An automatic measuring apparatus includes a measuring device that measures a dimension of a workpiece, the measuring device including a movable element that is displaceable with respect to a fixed element and moves forward and backward to be brought into contact with or away from the workpiece, and a displacement detection part that detects a displacement or position of the movable element, and an automatic operation part that automates the forward/backward movement of the movable element by power. A workpiece holding part that holds the workpiece in such a manner that a position and posture of the workpiece is changed at a pressure lower than a predetermined measurement pressure set in advance in the measuring device when the movable element is brought into contact with the workpiece.

Abstract: There is provided an automatic measuring apparatus that automates an inexpensive and easy-to-use contact-type measuring device. An automatic measuring apparatus includes a measuring device including a movable element that is displaceable with respect to a fixed element and moves forward and backward to be brought into contact with or away from a workpiece, and a displacement detection part that detects a displacement or position of the movable element, and an automatic operation part that automates the forward/backward movement of the movable element by power. When the movable element is brought into contact with the workpiece, vibration is applied directly or indirectly to at least one of the workpiece and the measuring device in such a manner that contacting surfaces of the workpiece and the measuring device are in close contact with each other by changing a relative position and posture between the workpiece and the measuring device.

Abstract: A three-dimensional-measuring-apparatus inspection gauge includes a plurality of targets to be measured with which a tip of a probe of a three-dimensional measuring apparatus comes into contact; and a frame member that supports the plurality of targets. The plurality of targets are arranged in positions corresponding to each vertex of a triangular prism.

Abstract: An annular optical configuration is provided for utilization in a metrology system to redirect source light. The metrology system includes a camera that provides images of a workpiece at different focus positions through operation of a variable focal length lens and an objective lens configuration (OLC). The OLC includes one of a plurality of objective lenses having respective working distances and working distance focus positions. An annular lighting configuration directs source light toward a first central volume which includes a first working distance focus position of a first objective lens when the first objective lens is included in the OLC. When a second objective lens with a second working distance focus position is included in the OLC, the annular optical configuration is configured to be located in front of the lighting configuration to redirect the source light toward a second central volume which includes the second working distance focus position.

Abstract: A metrology system including a heterodyne light source is provided. The heterodyne light source includes a first light source, an acousto-optic modulator and a source optical arrangement. The acousto-optic modulator receives at least one wavelength laser beam from the first light source and generates at least one corresponding frequency shifted laser beam (e.g., with orthogonal polarization). The source optical arrangement includes a receiving optical element portion and a birefringent optical element portion. The receiving optical element portion receives the wavelength laser beam(s) and the corresponding frequency shifted laser beam(s) and directs the beams along an optical path toward the birefringent optical element portion. The birefringent optical element portion combines the beams to output a combined beam (e.g., which may be utilized as part of a measurement process to determine at least one measurement distance to at least one surface point on a workpiece, etc.).

Abstract: The invention relates to the field of interferometry, in particular to Fizeau interferometers for improving a contrast of an interferogram. The Fizeau interferometer comprises a light source, a reference surface, a test surface positioned in on a support of the Fizeau interferometer and an imaging system. The Fizeau interferometer utilizes a polarizing reference surface to improve the contrast of the interferogram. The invention further relates to a method for using the Fizeau interferometer of the invention for improving contrast of an interferogram obtained by the Fizeau interferometer.

Abstract: There is provided a displacement measuring apparatus capable of reducing power consumption in a sleep mode. An operation mode of a signal processing unit includes a measurement operation execution mode to calculate a displacement or position as a measurement value using a sensor signal from a displacement sensor, and a sleep mode to reduce power consumption compared to the measurement operation execution mode. In the sleep mode, the signal processing unit performs a substitute calculation process at a predetermined sampling frequency to calculate a substitute value related to the displacement or position using fewer sensor signals than in the measurement operation execution mode. The operation-mode control unit assumes that a variation of the displacement sensor has been detected when there is a variation in the substitute value, cancels the sleep mode, and switches the signal processing unit to the measurement operation execution mode.

Abstract: A variable focal length lens device includes: a variable focal length optical system configured to change a focal length; a beam splitter configured to cause passing light, which is reflected off an object and passes through the variable focal length optical system, to branch into branched beams; an image-forming lens configured to condense the branched beams respectively; an image sensor configured to capture an image of the object by receiving the branched beam condensed by the image-forming lens; and an image sensor configured to capture an image of the object by receiving the branched beam condensed by the image-forming lens. An imaging distance on a first optical axis from the image sensor to the image-forming lens and an imaging distance on a second optical axis from the image sensor to the image-forming lens are different from each other.

Abstract: Three-dimensional geometry measurement apparatuses includes: a first identification part that identifies a primary absolute phase value corresponding to each of a plurality of pixels of a first image capturing part; a second identification part that identifies a secondary absolute phase value corresponding to each of a plurality of pixels of a second image capturing part; a conversion identification part that identifies a conversion value for converting primary coordinates or secondary coordinates; and a geometry identification part that converts the primary coordinates or the secondary coordinates on the basis of the conversion value, and identifies a three-dimensional geometry of an object to be measured on the basis of the converted coordinates.

Abstract: A calibration jig which calibrates a measurement apparatus that measures a three-dimensional geometry of a measurement target and includes a plurality of imaging parts that capture the measurement target, the calibration jig including: a plurality of elements to be measured; and a frame part to which the plurality of elements to be measured are attached, wherein each of the plurality of elements to be measured includes a main body part having a predetermined shape; and a plurality of label parts provided on the main body part, wherein an identification code for identifying the elements to be measured is shown on each label part.

Abstract: A calibration jig that calibrates a measurement apparatus for measuring a three-dimensional geometry of a measurement target, including: a plurality of elements to be measured, a frame part to which the plurality of elements to be measured are attached, and a mechanism part that moves the frame part, wherein the mechanism part includes: a rotation mechanism that rotates the frame part about a first axis; a first swinging mechanism that swings the frame part about a second axis orthogonal to the first axis; and a second swinging mechanism that swings the frame part about a third axis orthogonal to the first axis and the second axis.